Special:Badtitle/NS90:«no subject» (6)
From ETHW
With the encouragement of Eiichi Ohno, I offer the following 56-word citation:
Hitachi developed practical field emission electron source technology, in collaboration with Albert Crewe (University of Chicago), and commercialized the world’s first field emission scanning electron microscope in 1972. This technology enabled stable and reliable ultrahigh resolution imaging. Field emission electron microscopes have made invaluable contributions to research and progress in physics, chemistry, biology, and the semiconductor industry.