Burn Jeng Lin: Difference between revisions
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He has continued the cause for immersion lithography with groundbreaking papers that have mapped out scaling laws for super-high numerical aperture immersion optics, and he has led the development of defect-reduction methods to address concerns regarding the technology. As a result, immersion lithography has quickly become a manufacturing technology in just a few years. | He has continued the cause for immersion lithography with groundbreaking papers that have mapped out scaling laws for super-high numerical aperture immersion optics, and he has led the development of defect-reduction methods to address concerns regarding the technology. As a result, immersion lithography has quickly become a manufacturing technology in just a few years. | ||
An IEEE Life Fellow, Dr. Lin is currently the senior director of the Nanopatterning Technology Division at TSMC, Ltd., the world’s largest silicon foundry. | An [[IEEE Fellow Grade History|IEEE Life Fellow]], Dr. Lin is currently the senior director of the Nanopatterning Technology Division at TSMC, Ltd., the world’s largest silicon foundry. | ||
[[Category:Semiconductor_device_manufacture]] | [[Category:Semiconductor_device_manufacture]] | ||
[[Category:Lasers,_lighting_&_electrooptics]] | [[Category:Lasers,_lighting_&_electrooptics]] | ||
[[Category:Optics]] | [[Category:Optics]] | ||
Revision as of 17:50, 6 September 2011
Biography
Burn J. Lin is recognized as a technical leader in the semiconductor manufacturing industry and most responsible for 193-nm immersion lithography. In 2002, Dr. Lin proposed immersion lithography, which is a resolution-enhancement process that replaces the air gap between the lens and the wafer surface with a liquid medium, such as purified water. Through Dr. Lin’s perseverance in convincing the industry that a change was needed, immersion lithography was adopted, and manufacturing of 45-nm feature sizes and smaller have become possible.
He has continued the cause for immersion lithography with groundbreaking papers that have mapped out scaling laws for super-high numerical aperture immersion optics, and he has led the development of defect-reduction methods to address concerns regarding the technology. As a result, immersion lithography has quickly become a manufacturing technology in just a few years.
An IEEE Life Fellow, Dr. Lin is currently the senior director of the Nanopatterning Technology Division at TSMC, Ltd., the world’s largest silicon foundry.
